Material:RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Size: circular targets:Diameter 15mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm
Table 1: technology parameter
Grade | 3N, 3N5, 4N, with Ta 99.99%min |
Recrystallization | 95%min |
Grain size | ASTM 4 or finer |
Surface finish | 16Rms max. or Ra 0.4 ( RMS64 or better) |
Flatness | 0.1mm or 0.15% max |
Tolerance | +/-0.010" on all dimensions |
Table 1. Chemical composition:
Tantalum target