No. | Item | Specifications | |
Gauge pressure |
Absolute Pressure |
|
|
35KPa,100KPa,250KPa, 600KPa,1MPa,1.6MPa,2.5MPa | 100KPa,250KPa,600KPa, 1MPa,1.6MPa,2.5MPa,6MPa, 10MPa,25MPa,40MPa,60MPa | ||
02 | Offset | ≤30mV@1mA | |
03 | Span Output | ≥30mA(≤35KPa) ; ≥60mV (other scale) | |
04 | Nonlinearity | ±0.25%F.S. | |
05 | Power Supply | 1 mADC (typical), 5V (optional) | |
06 | Zero Temperature Coefficient | ±0.1%F.S./ºC | |
07 | Sensitivity Temperature Coefficient | ±0.1%F.S./ºC(≤35KPa) ±0.05%F.S./ºC(other scale) | |
08 | Overload Capacity | 2 times scale(≤10MPa);1.5times scale(>10MPa) | |
09 | Bridge Resistance | 5 (1±20%) KΩ | |
10 | Operating Temperature | -45ºC~+100ºC | |
11 | Short Term Stability | ±0.05%F.S./8h | |
12 | Chip Size(um) | 2700×3450 | |
Notes |
1.Calculating method of nonlinearity is the Least Squares Method. 2.Short Term Stability is tested under 25ºC,5VDC. 3.Other results are attained with the reference temperature 25ºC,1mADC. 4.Silicon wafer thickness c=400um,glass thickness d=800um |
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