Parylene Vacuum laboratory equipment Model MQP-9001

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https://www.mg-parylene.com/Parylene-Vacuum-laboratory-equipment-Model-MQP-9001.html

Product Details
Equipment Model


Main Parameter

3001 6001 7001 8001 9001
Voltage 3 phases 380V 50Hz
Power 3KW 5KW 8KW 10KW 10KW
Overall Dimensions 2000*1500*1000mm 3000*1800*1500mm
Cavity Size ø320*320mm ø550*700mm ø650*800mm ø750*900mm ø850*900mm
SuitableMaterials Model: Parylene N/C/D/F
Film Forming Rate Type C≥5µm/h Type N≥0.8µm/hType D≥5µm/h Type F≥5µm/h
DepositedFilmThickness 0.001-100µm 0.1-50µm
CoatingThicknessUniformity Better than 2% Better than 5%
Cavity VacuumDegree ≤3.0*1-2Torr
Supporting Devices 1.Including one copeofprocess file ofsurface pre-treatment coupling agentforpromotingthe adhesion of the Parylene film layer to the substrate. 2.Withtheappliancefor loading in cavity, you can select one according to yourtechnologicalrequirementssuch asrolling coating,jiggingcoating,hanging coating.
SafetyDevice The device has a self-locking function,Ifanabnormityoccursin the course of operation, the device will alarm and stop running.
MainStructures It mainly consists of vacuum pumping and measuring system, vacuumcavitysystem, evaporation chamber, cracking chamber, deposition chamberheating system, high temperature quartz pipe system, cold trap filtration system, PLC control system and auxiliary system.
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  • Contact:Chenglong Jiang
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Maggie Nano Technology (Suzhou) Co., Ltd.