Items | Parameters |
Acquisition methods | Digital industrial camera |
Microscope resolution | ≤3.3um |
Microscope amplification | 22~136 |
Microscope illumination | Concentration photovotaic |
Travel base | ≤3um |
Chord length range | ≤0.05mm |
Test working hour | 5min ~10min |
External dimension | 535mm×575mm×520mm |