Laser Pattern Generator

The photorepeater is designed for operation in clean room. Machine unit - Class 100. Control system - Class 10000.
Power supply of the photorepeater is provided from AC power line 220/380 V, 50 Hz; power consumption up to 3 kW; footprint 17 m² ( 10 m² in clean room Class 100, 7 m² in clean room Class 10 000 ).

The system operates in the following automatic modes:

The system operates in automatic mode and is remotely controlled by the operator. Its operation is based on die-by-die transfer (multiplication) of reduced reticle image onto the photomask blank plate.

The photorepeater is intended for manufacture of metallized master and production photomasks in LSI, VLSI production.

Photorepeater is designed for fabrication of metallized master and production photomasks in production of semiconductor devices