motor

Miniaturization is much in demand. Whether in the field of electronics, mechanical engineering or biology, high demands have to be met in terms of dimensional accuracy of ultra-miniature structures in particular. To be able to measure structures in the sub-micrometer range reliable, specialist know-how is essential; simply adopting a downsized standard solution from the "big world" is not an option. Linear positioners, permitting tiny increments beneath a measuring probe by means of piezo actuators, have been a tried and proven method for a long time. They do a reliable job even in the nanometer range. One of the disadvantages of them, though, is the low dynamism of their drives and their limited feed length. A patented system comprising a fast DC drive in combination with a high-precision piezo rotary drive mounted on a common spindle has provided a solution to this dilemma. Rapid delivery to the measurement point, then minimal feed rate for maximum resolution over long positioning distances is no longer a problem.