Linear motor precision stage---The YZD module is a high performance YZ positioning table aimed for high throughput vertical application. Moving mass for both axes are almost the same due to the special decoupling mechanism, which achieves high acceleration/deceleration positioning. In Y axis, the moving-magnet scheme and stationary feedback encoder eliminate all the moving cables and lower the moving mass as well as result in considerably small footprint. An iron-core linear motors is employed to achieve high force density.Due to the stationary motor winding tightly mounted on the large area of base, the heat generated by the motor winding will be effectively removed which eliminating the need of? complicated cooling system. In Z axis, a voice coil motor is adopted to minimize the gravity due to vertical moving mass. The driver has integral positioning/touch-down/force-control function which is desired for the application required high bonding force. With our advanced driver, positioning, touch-down, and force control are achieved digital I/O's. The touch-down speed and force can be pre-programmed thru RS232. This successfully achieves the following two advantages. First, the touch-down action is locally controlled by the driver so that the expensive motion controller with DA channel is no longer needed. Second, the touch-down procedure can be accelerated because the latency due to motion mode change is eliminated. The customer can request spring for gravity balance or air-piston for anti-falling when power is gone. Effective stroke, user-specified mounting holes, encoder resolution, type of brake, external payload, accuracy grade, and the required motion profile all can be specified by the customer to achieve seamless integration into your machine design. Download the specification-generation (SpecGen) program for the request of detailed outline drawings and quotation. Since the information you provide will be directly fed to our automatic design program, please double check before you submit. Main Features Applications Specification Download High bandwidth for both axes Low moving mass High precision Vertical use Integrated positioning, touch-down, and force control for Z axis
YZ-axis Decoupled motion stage for vertical use (YZD) |
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