Inline Sputter Coating System

4kgf/ cm²

Cooling Water

Convection or Pirani gaugeIon gauge

Vacuum Gauge

PLC or PC base

Electrical Control system

20

[kW]

Generator power per cathode

DC, pulsed DC, RF

Power Generator

Planar / Rotatable

Magnetrons Cathodes

< 5x10^-5

[mbar]

Ultimate pressure

20...300

[]

Temp. Pretreatment

rotary pump / dry pump , diffusion pump / turbo pump / cryo pump

Vacuum Pumps

0.2 10

[m/min]

Speed range

Stainless Steel

Chamber Material

 

Technical Date

Htc develops key techniques for automobile lamp mask reflection coating equipment, cutting tool surface coating equipment, thin film PV solar cell coating system equipment, and provide clients with design service to expedite their development schedule and help them create better product profits as well as greater market shares.