Thin Film Solar Cell Sputtering PVD System
Product Details
20000x1900x2500
[mm]
Approx. Dimensions
Stainless Sheet
Chamber Material
5...8
No. Process Chambers
PLC or PC base
Electrical Control
Compounds
Metals, Alloys, Multi Layers,
Layers
20
[kW]
Generator power per cathode
DC, pulsed DC, MF, RF
Modes
Planar / Rotatable
Magnetrons
< 5x10-6
[mbar]
Ultimate pressure
20...200
[
- Country:Taiwan
- telephone:886-6-2460296
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