Turbo-V 81 M Vacuum Pump - Turbo Pump

Pump Model Turbo-V
81 M Turbo-V
81 T Turbo-V 301
Navigator Turbo-V 551
Navigator Turbo-V 701
Navigator Turbo-V 1001
Navigator
Pump Specification DN 40 DN 63 DN 100 DN 160 DN 200 DN 250
Pumping Speed, l/s
Nitrogen 50 77 250 550 690 1050
Helium 56 65 220 600 620 900
Hydrogen 46 50 200 510 510 920
Compression Ratio
Nitrogen 5 x 108 7 x 108 7 x 108 > 1 x 109 1 x 109 1 x 109
Helium 8 x 104 3 x 103 1 x 105 1 x 107 1 x 107 1 x 107
Hydrogen 7 x 103 3 x 102 1 x 104 1 x 106 1 x 106 1 x 106
Base pressure, mbar
with recommended
mechanical pump 5 x 10-10 5 x 10-9 < 5 x 10-10 < 1 x 10-10 < 1 x 10-10 < 1 x 10-10
with recommended
dry pump 5 x 10-9 5 x 10-8 < 5 x 10-9 < 1 x 10-10 < 1 x 10-10 < 1 x 10-10
Startup Time, min < 1 < 1 2.5 < 5 < 5 < 4
Rotational Speed,
rpm 80,000 80,000 56,000 42,000 42,000 38,000
Recommended Forepump
Two-stage
mechanical pump DS 42 -
DS 102 DS 42 -
DS 102 DS 102 DS 302 DS 402 DS 402
Dry pump SH-110 SH-110 SH-110 TS300 TS300 TS300
Inlet Flange, nominal diameter
Klamp Flange, mm 40 - - - - -
ConFlat?, mm
(inches OD) 35 (2.75) 63 (4.5) 100 (6) 160 (8) 200 (10) -
ISO clamp style, mm - 63 100 160 200 250
ISO-F bolted, mm - - - 160-F bolted 200-F bolted 250-F bolted
Foreline Flange, nominal diameter
Klamp Flange NW16 NW16 NW16 NW25 NW25 NW40
SEM Version
Available on Request - -
Controllers
Rack Controller
Navigator on board
Controller
Integrated lectronics - - - - - -
PCB Controller - - -

Turbo-V
81 M Turbo-V
81 T Turbo-V 301
Navigator Turbo-V 551
Navigator Turbo-V 701
Navigator Turbo-V 1001
Navigator