Model
|
DDP-15
|
DDP-18
|
DDP-22
|
DDP-28
|
|
Pumping Speed
|
l/sec
|
5000
|
9000
|
12000
|
25000
|
Ultimate pressure
|
Torr
|
10-7
|
|||
In-Let Port
|
inch
|
15
|
18
|
22
|
28
|
Out-Let Port
|
inch
|
21/2
|
4
|
6
|
6
|
Power(220V, 3P, 60Hz)
|
kW
|
6
|
5.4(6.4)
|
6(8)
|
9(13)
|
Diffusion pump oil
|
l
|
1.5
|
3
|
5
|
8
|
Cooling water(20
|
Model 5000 9000 12000 25000 |