Bonded Slit Valve Doors

Bonded Slit Valve Doors
Greene, Tweed engineers strive to find solutions that make customers' challenges disappear. Our BSV (Bonded Slit Valve) Door increases the life expectancy and performance of a door's seal during semiconductor processing. Before Greene, Tweed's BSV, O-ring replacement was the only option. BSV doors ease the replacement process--changing the complete BSV door assembly requires simply removing and replacing a few bolts. Greene, Tweed's bonded design minimizes abrasion, leading to extended seal life and less particulation compared to the use of a typical perfluoroelastomer O-ring.

MATERIALS
Elastomers
 
 
LITERATURE

  • Country:Japan
  • telephone:81-12152569521
Greene, Tweed engineers strive to find solutions that make customers' challenges disappear
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