The smallest 3-D piezoactuator is manufactured for ultra precise positioning tasks in limited space. The microTRITOR allows motion of up to 9 ?m in the x-, y- and z-axes and has a maximum load of 15 N. With these advantages and a resonant frequency of 2.3 kHz, the microTRITOR meets challenges in AFM, SNOM, and RAMAN - microscopy or other scanning applications.
The smallest 3-D piezoactuator is manufactured for ultra precise positioning tasks in limited space |