High throughput 4-head scrubber

Description

Spin scrubbers equipped with horizontally-rotating brush mechanisms are now widely used in semiconductor manufacturing processes because of their superior cleaning effects. Meanwhile, as wafer cleaning processes continue to proliferate and their performance criteria become more exacting, there is also growing demand for spin scrubbers which can both boost productivity and vary cleaning parameters according to wafer surface conditions. In response to such needs, Dainippon Screen has pushed beyond conventional technology to develop the SS-80BW-AR, a high performance spin scrubber featuring superior throughput.

  • Country:South Korea
  • telephone:82-02-7766-786
High throughput 4-head scrubber HS CODE 8469110000
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