a-Si back contact inline sputter

Process zone:
-AZO sputtering
-Gas separation zone
-Ag-Al sputtering
Preheat temperature: 250oC
Cycle time: 60-90 sec
Speed range: 0.3 ~4 m/min
High vacuum pumps: Turbo pumps
Ultimate pressure: < 2x10-6 torr
Magnetron unit: BEKAERT Rotatable
Sputtering mode: DC / pulse-DC
Electrical control: PLC + iPC w/ win XP
HMI: 19 Touch-Screen

Country:Taiwan
telephone:886-928-900315

In-line back contact sputter for AZO/Ag(Al) deposition.
Designed for 30MW a-Si solar cell production
1.1 m x1.4 m glass size

*Your name:	Enter name here eg:Ralph zhang
*Your Email:	Enter email here
*To:	Linco Technology
*Subject:
*Message:
	Enter between 20 to 3,000 characters. English only. Characters Remaining: 0 / 3000
*Enter the secure code shown below	Reload Image