Hot Plate Modules Feature
HMDS Prime Plate Modules Feature
Spin Modules Feature
Chill Plate Modules Feature
Indexer Module Feature
Application
Meteor series are readily available to enhanced the process capability of this system. Automated photolithography processing system PC-Controller operation / process recipe user programmable
Operator mode / Engineer mode / Supervisor mode.
KT3100B 75mm/150mm
Belt transfer system