High Precision Irradiation with Constant Illuminance Square-wave lighting utilizing a high frequency inverter offers high precision, reliable UV irradiation with optimized illuminance and light intensity. |
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Automatic Feedback Illuminance Control A built-in sensor enables feedback control to keep constant UV lighting output. By maintaining steady lighting throughout the lamp's life, the system contributes to fabrication of a constant quantity of semiconductors. |
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Easy Operation with One Press of a Button Improves operability and stability with center loading, while significantly stepping up operational efficiency. |
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Quick and Uniform Irradiation of Entire Surface Uniform irradiation of the entire surface is assured through mobilization of a nitrogen-filled chamber. Irradiation speed can be freely adjusted in accordance with conditions including wafer size and type. |
Easy Operation with One Press of a Button
Improves operability
Easy Operation with One Press of a Button Improves operability |