2000 m/8 UV irradiation equipment

Country: United States
telephone: 1-1-480-966-0784

High Precision Irradiation with Constant Illuminance Square-wave lighting utilizing a high frequency inverter offers high precision, reliable UV irradiation with optimized illuminance and light intensity.

2.	Automatic Feedback Illuminance Control A built-in sensor enables feedback control to keep constant UV lighting output. By maintaining steady lighting throughout the lamp's life, the system contributes to fabrication of a constant quantity of semiconductors.

3.	Easy Operation with One Press of a Button Improves operability and stability with center loading, while significantly stepping up operational efficiency.

4.	Quick and Uniform Irradiation of Entire Surface Uniform irradiation of the entire surface is assured through mobilization of a nitrogen-filled chamber. Irradiation speed can be freely adjusted in accordance with conditions including wafer size and type.

Easy Operation with One Press of a Button
Improves operability

Easy Operation with One Press of a Button
Improves operability

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