NXQ7500 Mask Aligner

Options: 

Features & Benefits:

• Automatic Alignment using Q-Vision pattern recognition software for both top and bottom side applications. Easy to use, recipe driven, storable formulas, fast and extremely accurate.
• Modular design allows easy upgrades. Robotic wafer loading and Optical Backside Alignment can be added at any time to the standard manual aligner.
• Auto Load Aligner is two machines in one; a full production aligner with robotic loading and a manual load aligner for processing pieces and R&D substrates.
• Precision Air Bearing Guide Set never needs oil and is designed to eliminate any shifting during alignment. Air bearing frictionless leveling can level the smallest substrates keeping them parallel to the mask and includes automatic wedge error compensation.
• Motorized, low profile align stage is extremely stable and accurate. An optional Scan Stage, coupled with microscope Y motion can align the flats of wafers up to 6 inch diameter.
• Five (5) individual printing modes (Pressure Contact, Vacuum Contact, Proximity, Vacuum Calibration and Vacuum Proximity) are available by recipe selection with complete control of all parameters.
• 7:1 Zoom (VideoView) Microscope allows exact setting of the magnification/field-of-view. Objectives with long working distance and excellent depth of focus provide clear imaging of the mask and wafer during alignment.

NXQ Advantage:

The NXQ7500 Mask Aligner combines an open architecture modular design with precision alignment and exposure features. It supports vacuum contact, pressure contact and proximity printing and handles partial and whole substrates up to 200 mm (8) in diameter. The versatile NXQ7500 offers the most extensive printing possibilities of any aligner in its class, making it the choice of Manufacturing Facilities, R&D Centers and University Programs around the world

NXQ7500 Automatic Production Mask Aligner