It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes. Types of Products : Focus Ring, Insert Ring, Collar Ring, Shield Ring, Hot Edge Ring, Protection Ring etc. |
It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes.
It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes. |