software-CIMPortal

CIMPortal Architecture
CIMPortal Products
For Equipment Suppliers
For IC Makers
Features & Benefits
Advanced Process Control (APC) Data Gathering
Tool Data Interface (TDI) Specification Compliance
Data Collection Interface Modules (DCIM) Application
Related SEMI Standards
System Requirements
Additional Information

The CIMPortal software development kit provides a comprehensive equipment data acquisition (EDA) solution for equipment manufacturers as well as for integrated device manufacturing (IDM) retrofitting existing equipment. Once an equipment model is created and the data collection is integrated into CIMPortal, multiple modules can simultaneously access the equipment model data at the same time. The CIMPortal Interface A module, CIMWeb, is 100% compliant to the SEMI Interface A standards. The CIMPortal DB module, CIMStore, supports collecting data into a MySQL database and even enables conformance to the JEITA TDI specification. CIMPortal Bundle includes both CIMWeb and CIMStore to simultaneously support Interface A and local database storage.

CIMPortal Software for Equipment Data Acquisition (EDA)