Solar Cell Processing Systems
Product Details
3-4 tube furnaces, flat zones of 800 - 1100 mm Load up to 500 wafers per tube Max. wafer size 200 x 200 mm Temperature range available 380 - 1350 oC P & N type diffusion/oxidation/CVD processes Fast cool down, controlled, more than 20 oC/min. Furnace control by: Digital Temperature Controller (DTC) Digital Proces Controller (DPC) Colour TFT touchscreenTempress data management system Loading by Softlander system Loading automation/waferhandling system available: Longboat elevator system Mass Wafer transfer system Plastic carrier stocker system Including cooldown and pre-load positionsLow maintenace High quality, performance and full support. Request brochure about solar cell processing systems
- Country:India
- telephone:91-91-80-2364-0503
| 3-4 tube furnaces, flat zones of 800 - 1100 mm |
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