Solar Cell Processing Systems

3-4 tube furnaces, flat zones of 800 - 1100 mm Load up to 500 wafers per tube Max. wafer size 200 x 200 mm Temperature range available 380 - 1350 oC P & N type diffusion/oxidation/CVD processes Fast cool down, controlled, more than 20 oC/min. Furnace control by: Digital Temperature Controller (DTC) Digital Proces Controller (DPC) Colour TFT touchscreenTempress data management system Loading by Softlander system Loading automation/waferhandling system available: Longboat elevator system Mass Wafer transfer system Plastic carrier stocker system Including cooldown and pre-load positionsLow maintenace High quality, performance and full support. Request brochure about solar cell processing systems