Model 20SX/25SX Vacuum Particle Sensors
Product Details
Features" High power laser diode for 0.19 micron sensitivity and large detection area " Ultra compact probe design " In-chamber monitoring
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Features" Short wavelength laser for 0.3 micron sensitivity " Sensor bus compliant operation " Compact design allows installation adjacent to process modules " Optical noise cancellation reduces plasma interference " Easy to clean cartridge windows ...
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Features" High power laser diode for 0.17 micron sensitivity and large detection area " Heated sapphire windows to protect the sensor from corrosion or deposition " Reduced laser operating power for extended MTBF " CE marked for heavy industrial use ...
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