SE-103 pressure sensor dies

2. mass-flow in industrial processes through differential pressure measurement

1. air-flow in industrial processes through differential pressure measurement

Typical applications:

3. suitable for either constant current or voltage excitation

2. integrated thermistor to measure the tem-perature of the pressure medium

1. two pressure chambers for measuring system and differential pressure at the same time

Features:

Se105 sensor dies can be used to measure differential pressure ranging from 0.4 to 10 bar  (see following specifications for details). The die possesses high accuracy up to 0.25%fso (fso = full scale output), the output signal is Wheatstone bridge circuit output in millivolt. A constant voltage 5V or constant current 1mA are standard excitation power for SE105 silicon sensor dies.

The back side of the Se105 die has two silicon cups (pressure chambers), that is, two Wheatstone bridge circuits. The back side of the Se105 die is sealed with a glass cover with only one vent to one of the silicon cup (diff. cup). As a result, SE105 die is able to measure the system pressure (also called line pressure or static pressure) and the differential pressure at the same time. Therefore, SE105 silicon sensor dies are perfect for applications such as air-flow and mass-flow measurements. Furthermore, the SE105 silicon sensor die is also equipped with an integrated temperature sensor, so as to measure the pressure media temperature as well.

Based on piezoresistive effect, BCM SE105 Multifunctional piezoresistive silicon pressure sensor dies are made from supper quality silicon wafer with 4 diameter. These dies are in mass production by means of Micro-Electro-Mechanical System (MEMS) technology.

Multifunctional Pressure Sensor Dies Model SE105

SE-105 pressure sensor dies