Gas Disposal- Waste gas abatement system NORUMA

                • Delivers continuous operation, 24 hours a day, 365 days a year.
                • Uses catalysts.
                • Incorporates filtration technology for removing particulate matter.
                • Forced air design accelerates oxidation.
                • Features a longer maintenance cycle and improved safety.
                The Noruma is ideal for processes such as ion implantation that generate few waste gases. It combines a compact footprint with long-term reliability.
                Waste gas abatement in all CVD processes, ion implantation, and epitaxial processes
                Product


                Noruma
                Model
                RW030D4
                EW010B2
                NW005X2
                Dimensions (mm)
                2140
  • Country:Japan
  • telephone:81-06-1234-5678
Delivers continuous operation, 24 hours a day, 365 days a year.
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