Gas Disposal- Waste gas abatement system

          • Specifications and performance have been specifically designed for use with LP-CVD processes.
          • Minimum footprint and height.
          • Special air currents increase heat transmission, accelerating the gas abatement rate.
          • Minimal initial costs.
          • Simple disassembly of key parts ensures high maintenance performance.
          • SEMI standard certification (S2-0703, S8-1103).
          Prinz is a thermal/wet type waste gas abatement system specifically designed for use with LP-CVD processes.
          Waste gas abatement used by LP-CVD and other processes; abatement of PFC gases
          Model
          SS003A1-PR
          Abatement method
          Thermal/wet
          Dimensions (mm)
          850
  • Country:Japan
  • telephone:81-06-1234-5678
Specifications and performance have been specifically designed for use with LP-CVD processes.
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