Gas Disposal- Waste gas abatement system LEO

            • Delivers continuous operation, 24 hours a day, 365 days a year.
            • Uses catalysts.
            • Incorporates filtration technology for removing particulate matter.
            • Forced air design accelerates oxidation.
            • Features a longer maintenance cycle and improved safety.
            The Leo is a high-end dry type waste gas abatement system featuring a variety of control functions designed to facilitate smooth manufacturing equipment operation as well as a special structure capable of continuous waste gas abatement over the long term.
            Waste gas abatement in all CVD processes, ion implantation, and epitaxial processes
            Product
            Leo


            Model
            RW030D4
            EW010B2
            NW005X2
            Dimensions (mm)
            2140
  • Country:Japan
  • telephone:81-06-1234-5678
Delivers continuous operation, 24 hours a day, 365 days a year.
Uses catalysts.
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