Gas Disposal- Waste gas abatement system
Product Details
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- Specifications and performance have been specifically designed for use with PE-CVD processes.
- Minimum footprint and height.
- Special air currents increase heat transmission, accelerating the gas abatement rate.
- KaiserNeo has a CAC system with high corrosion resistance.
- Simple disassembly of key parts ensures high maintenance performance.
- SEMI standard certification (S2-0703, S8-1103).
KaiserNeo is a thermal/wet type waste gas abatement system specifically designed for use with PE-CVD processes.Waste gas abatement used by PE-CVD and other processes; abatement of PFC gasesModelSS003A1-KNAbatement methodThermal/wetDimensions (mm)850
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- Country:Japan
- telephone:81-06-1234-5678
| Specifications and performance have been specifically designed for use with PE-CVD processes. |
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