Gas Disposal- Waste gas abatement system
Product Details
- Plasma burner design (patent pending) provides a stable supply of plasma.
- Space-saving design turns conventional wisdom on its head.
- Simple structure for easy maintainability.
- Features 20% lower water and power consumptions than burning or thermal-type scrubber.
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The Thunder is compatible with PFC gases such as CF4 and SF6 that are difficult to abate with existing waste gas abatement systems. This state-of-the-art system minimizes running costs
while maximizing abatement throughput.
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Waste gas abatement in processes such as dry-etch, LP, and PE-CVD; abatement of PFC gases such as CF4 and SF6
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- Country:Japan
- telephone:81-06-1234-5678
| Plasma burner design (patent pending) provides a stable supply of plasma. |
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