Applied Centura Epi system

Applied Centura Epi is the industry standard solution for low-cost, epitaxial wafer manufacturing. Applied Centura Epi provides 100% slip free films, excellent film thickness uniformity, resistivity uniformity and low defect levels. Features Crystal defect-free epi films for substrate applications Uniform deposition of epi films with excellent wafer-to-wafer repeatability performance Robust hardware technology with proven process for higher tool availability and lower CoO Modular serviceable ergonomic design offering ease of maintenance and use 2 or 4 chamber configuration for maximum flexibility Applications: substrate epitaxial growth